High-Purity Nitrogen Purification Solutions for the Air Separation Industry

Industry Pain Points

Difficulty in Deep Removal of Trace Oxygen: Crude nitrogen from air separation contains 1-1000ppm oxygen. Traditional catalytic deoxygenation processes result in residual oxygen ≥0.1ppm, failing to meet the requirement for electronic-grade nitrogen (≤0.01ppm).

Hydrocarbon Contamination: CH₄/C₂H₆ (0.5-5ppm) produced by lubricating oil cracking poisons deoxygenation catalysts, shortening their service life from 5 years to 6-12 months.

Large Dew Point Fluctuations: Pressure changes (0.5-3MPa) in air separation columns reduce the dehydration efficiency of molecular sieves by 30%, causing the dew point of finished nitrogen to drift (-70℃→-40℃).

High Energy Consumption Costs: The power consumption of traditional purification systems (deoxygenation + dehydration) accounts for 15-20% of the total energy consumption of air separation, with annual operating costs exceeding 5 million yuan (for 10,000-class air separation).

System Overview

Through the “nano-catalysis – low-temperature adsorption – thermal coupling” technology loop, Yipu High-Purity Nitrogen Purification System achieves:

  • Purity Leap: Breaks through the 0.005ppm residual oxygen limit, meeting the needs of 3nm chip manufacturing.
  • Energy Consumption Revolution: The system’s net energy consumption is only 1/7 of that of traditional processes, reducing the comprehensive cost of air separation by 18%.
  • Intelligent Protection: Full-life-cycle catalyst health management to avoid unplanned shutdowns.

Solution Approach

Yipu Air Separation Industry High-Purity Nitrogen Purification Solution

ModuleTechnical HighlightsPerformance Indicators
Nano Deoxygenation TowerPd/Al₂O₃ catalyst, honeycomb ceramic carrierOutlet O₂ ≤0.005ppm, service life ≥5 years
Low-Temperature AdsorberStainless steel vacuum jacket, direct refrigerant coolingDew point -80℃@3MPa, fluctuation ≤±2℃
Hydrocarbon TrapLayered modified activated carbon + zeolite molecular sieveCH₄ ≤0.01ppm, CO₂ ≤0.02ppm
Thermal Coupling SystemReaction heat recovery rate ≥90%, regeneration energy consumption 0.02kWh/Nm³No external heat source required
Intelligent ControlLaser oxygen analyzer + AI dynamic adjustment of catalyst temperatureControl accuracy ±0.5℃

Applicable Scenarios:

  • Preparation of electronic-grade nitrogen (≥99.9999%)
  • Ultra-high-purity nitrogen for aerospace
  • Protective gas for stainless steel bright annealing
  • Gas source for semiconductor packaging

Technical Principles

Yipu Four-Stage Ultra-Purity Purification Process:

  1. Deep Deoxygenation (Stage 1):Palladium-based nano-catalysts reduce O₂ to 0.005ppm at 200-250℃, increasing CH₄ poisoning resistance by 10 times.
  2. Low-Temperature Adsorption (Stage 2):Combined dehydration with -40℃ pre-cooling + 13X molecular sieves maintains a stable dew point of -80℃ (within ±0.5MPa pressure fluctuation).
  3. Hydrocarbon Removal (Stage 3):Activated carbon-zeolite composite bed adsorbs CH₄ to ≤0.01ppm, while simultaneously removing N₂O/CO₂.
  4. Self-Heating Regeneration (Stage 4):Uses deoxygenation reaction heat (ΔH=-285kJ/mol) to drive molecular sieve regeneration, saving 80% more energy than electric heating.

Core Advantage

AdvantageDetails
Customized on DemandMeets special working conditions; provides professional non-standard customization
Low CostAdopts cyclic regeneration process; significantly reduces operating costs
High StabilityDual-tower structure with small pressure fluctuation; low noise and continuous gas supply
Fully Automatic OperationEasy to operate, reducing labor input; improves efficiency
High SafetyPresets multi-level safety protection measures; supports automatic alarm
Low Failure RateMaintains low failure rate after 10,000 hours; high durability with almost no maintenance required

Technical Strength

Leading Adsorption Dehydration Technology

Uses high-performance molecular sieve adsorbents with high water absorption capacity and resistance to corrosion by acidic gases (H₂S/CO₂), ensuring deep dehydration with a dew point ≤-70℃.

The original hot nitrogen regeneration process reduces energy consumption by 30% compared with traditional electric heating regeneration, and integrates a waste heat recovery system to significantly improve energy efficiency.

Modular and Customized Design Capability

Core equipment adopts modular prefabrication, supporting rapid deployment (installation cycle shortened by 50%) and adapting to diverse scenarios such as offshore platforms, onshore gas fields, and LNG pretreatment.

Can customize single-tower, dual-tower, or multi-tower parallel systems according to customer needs, with a treatment capacity ranging from 10,000 to 1,000,000 Nm³/d, flexibly matching gas fields of different scales.

Intelligent Control and Remote Operation & Maintenance

Equipped with a PLC+IoT intelligent control system, it real-time monitors key parameters such as pressure, temperature, and dew point, supporting fault early warning and automatic adjustment.

Through cloud-based big data analysis, it optimizes the adsorption-regeneration cycle, extends the service life of molecular sieves, and reduces operation and maintenance (O&M) costs by 10%-15%.

Energy-Saving and Environmental Protection Technology

Features zero-emission design for regeneration exhaust gas, complying with international environmental standards such as EU CE and US EPA.

Energy consumption is 25%-40% lower than that of traditional triethylene glycol (TEG) dehydration systems, helping customers achieve carbon emission reduction goals.

Long-Cycle Operation Reliability

Molecular sieves adopt anti-pulverization coating technology, with a service life of over 5 years, reducing replacement frequency.

Key components (e.g., valves, instruments) are selected from international first-tier brands (e.g., Siemens, Emerson), with a Mean Time Between Failures (MTBF) of over 100,000 hours.

Strong R&D and Engineering Experience

Possesses more than 19 patents and software copyrights in dehydration technology; the R&D team is led by doctors and has in-depth cooperation with universities and colleges.

Has over 1,000 successful cases worldwide, covering extreme working conditions such as high-sulfur gas fields in the Middle East and low-temperature environments in the Arctic.

Product Advantage Comparison

IndicatorYipu SystemTraditional Refrigeration TypeCompetitor Adsorption TypeMembrane Separation Method
Residual Oxygen Content≤0.005ppm≥0.1ppm≥1ppm≥10ppm
Hydrocarbon ControlCH₄ ≤0.01ppmRequires additional treatmentCH₄ ≤0.1ppmNo hydrocarbon removal capability
Dew Point Stability-80℃±2℃ (0.3-3.5MPa)-70℃±15℃-60℃±10℃-40℃±20℃
Energy Consumption0.05kWh/Nm³ (comprehensive)0.3kWh/Nm³0.15kWh/Nm³0.08kWh/Nm³
Catalyst Service Life5 years (CH₄ ≤5ppm)1 year (fails at CH₄ ≥1ppm)Not applicableNot applicable

Typical Case

Project Name: A 30,000 Nm³/h Electronic-Grade Nitrogen Project for a Semiconductor Factory

Operating Conditions:

  • Feed Nitrogen: O₂ 10ppm, CH₄ 2ppm, dew point -60℃
  • Requirements: O₂ ≤0.01ppm, CH₄ ≤0.02ppm, dew point ≤-75℃

Effect:

  • Outlet O₂: 0.003ppm, CH₄: 0.008ppm, dew point: -82℃
  • Catalysts have been in operation for 4 years without replacement

Economic Benefits:

  • Annual savings of 12 million yuan in electricity and catalyst costs
  • Reduced wafer oxidation defect losses by 240 million yuan per year